第56章 第二阶段开始
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芯片的工艺制程级别划分为精密制程、高端制程和低端制程。
精密制程是在13纳米以下的制程，比如说9纳米，7纳米，5纳米，最精密的是3纳米；
高端制程介于13纳米至28纳米之间的，属于高端制程；
28纳米以上的制程为低端制程，比如130纳米，90纳米的制程。
“所以，我们要准备好，如果SEMI开始实施制裁，我们又该如何？”
廖老以这句话结束了今天的会议，给所有小组成员上了警钟。
开完会议，路阳跟着廖老来到办公室。
“小路啊，万里长征，我们只是走了第一步而已，切记太过急躁！”
路阳点头应声，心里暗叹：“如果没有技术封锁与贸易战，我也不急啊！”
“廖老，镜片呢？怎么没看到。”
廖锡昌正色对路阳说道：“专项小组所有人都是通过严格考核才进入的，有国安那边的人盯着，泄漏可能性不大，你小子也要注意下，镜片会通过特殊渠道运送过来，实验机组装的地方虽然在申城微电子，但却不属于这边，是独立保密的。”
实验机是专家组提出用来做镜片反射实验的设备，可以说是光刻机的简化版，完整组装成型机耗时太长，且拆卸成本太大，于是专家组才提出了这个方案。
要知道激光束击打液态锡是需要在真空尘环境下的，哪怕是简化版，整个设备的设计与组装耗时都不会太短。
“廖老，现在镜片技术已经上来，我们的90纳米DUV光刻机是否能提升精度？”
廖老说道：“没那么简单，还需要有对应的光学系统，DUV使用的是镜头组，而EUV是镜片反射组，原理并不一样。资料上的光学系统是针对EUV的，需要转换成DUV的系统，现在专家组没这个精力。”
路阳思索片刻，把华微海思考察的事情告诉了廖老。
“嗯，如果是他们的话，也许可以！不过你可能会暴露部分，这样吧，如果海思真有这个想法，到时我可以抽时间过去次，这次轮到我来扛旗了。”
路阳想起白学礼上次的表情，不由好笑，老一辈的科学家对研究的态度从来都是实事求是的，换成某些教授，巴不得天天扛大旗。
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